| Control System控制系統 | ||
| 1 |
Software 軟件 |
HL-5000（可隨時免費升級） |
|
Automatic 自動 |
Included 有 |
|
|
Manual 手動 |
Included 有 |
|
| 2 |
PLC 可編程控制器 |
Omron |
| 3 |
Industrial personal Computer 工控機 |
Touch Screen Computer 品牌平板電腦 |
| 4 |
Vacuum gauge 真空探頭 |
Edwards |
| 5 |
Temperature probe 溫度探頭 |
Pt100 |
| 6 |
Breaker 空開 |
Schneider |
| 7 |
Contactor 接觸器 |
Schneider |
|
8 |
Relay 繼電器 |
Schneider |
| Safety System安全系統 | ||
| 1 |
Vacuum failure protection 真空失敗保護 |
Included 有 |
| 2 |
Temperature failure protection 溫度失敗保護 |
Included 有 |
| 3 |
Compressor protection 壓縮機保護 |
Included 有 |
| 4 |
Other motors protection 其它電機保護 |
Included 有 |
| 5 |
Interlock protection 連鎖保護 |
Included 有 |
| 6 |
Cooling water failure protection 水壓失敗保護 |
Included 有 |
| 7 |
Air pressure failure protection 氣壓失敗保護 |
Included 有 |
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